منابع مشابه
the scanning electron microscope
it is only thirteen years since the scanning electron microscope has been available commercially. yet, even in this short period of time, this instrument has been a powerful tool in the investigation of topography, electrical and magnetic properties, crystal structure, cathodoluminescent characteristics etc. of solid specimens. today, this type of microscope has opened its place alongside the c...
متن کاملParallel electron-beam-induced deposition using a multi-beam scanning electron microscope
Lithography techniques based on electron-beam-induced processes are inherently slow compared to light lithography techniques. The authors demonstrate here that the throughput can be enhanced by a factor of 196 by using a scanning electron microscope equipped with a multibeam electron source. Using electron-beam induced deposition with MeCpPtMe3 as a precursor gas, 14 14 arrays of Pt-containing ...
متن کاملIO nm electron beam lithography and sub-50 nm overlay using a modified scanning electron microscope
Gratings of 10 nm wide metal lines 30 nm apart, and quantum transistor gates with 10 nm wide gaps over 300 nm long between two metal rectangles have been repeatedly achieved on thick GaAs substrates using a modified scanning electron microscope operated at 35 keV and liftoff of Ni/Au. Furthermore, multilevel electron beam lithography with a standard deviation (30) of an overlay accuracy (30 dev...
متن کاملThe Scanning Confocal Electron Microscope
The Scanning Confocal Electron Microscope, is an instrument which permits the observation and characterization of sub-surface structures of thick, optically opaque materials at nanometer level resolutions. The instrument merges the capabilities of the scanning, transmission and x-ray microscopes, and achieves unprecedented resolutions in optically dense materials, by implementing the technology...
متن کاملDental Wear: A Scanning Electron Microscope Study
Dental wear can be differentiated into different types on the basis of morphological and etiological factors. The present research was carried out on twelve extracted human teeth with dental wear (three teeth showing each type of wear: erosion, attrition, abrasion, and abfraction) studied by scanning electron microscopy (SEM). The study aimed, through analysis of the macro- and micromorphologic...
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ژورنال
عنوان ژورنال: Microscopy and Microanalysis
سال: 2019
ISSN: 1431-9276,1435-8115
DOI: 10.1017/s143192761900357x